Dielectric engineering of nanostructured layers preventing electrostatic charging in thin dielectrics

Kremena Makasheva (1) , Christina Villeneuve-Faure (2) , Caroline Bonafos (3) , Christian Laurent (2) , Alessandro Pugliara (4) , Bernard Despax (4) , Laurent Boudou (2) , G. Teyssedre (2)

1 LAPLACE-MPP - Matériaux et Procédés Plasmas
2 LAPLACE-DSF - Diélectriques Solides et Fiabilité
3 CEMES - Centre d'élaboration de matériaux et d'études structurales
4 LAPLACE - LAboratoire PLasma et Conversion d'Energie

New dielectric-engineering concept is developed intending a net improvement of the performance of dielectric layers under electrical stress. Instead of synthesis of new dielectric materials a new class of dielectric layers that gain their performance from design rather than from composition is established. Two kinds of nanostructured dielectric layers are presented here: (i) silicon oxynitride layers (SiOxNy:H) with gradual variation of their properties (discrete or continuous), and (ii) SiO2 layers with tailored interfaces; a single layer of silver nanoparticles (AgNPs) is embedded in the vicinity of the dielectric free surface. The nanostructured layers exhibit much shorter charge retention times and appear promising candidates for general applications where surface charging of dielectrics must be avoided, in particular for implementation in RF MEMS capacitive switches with electrostatic actuation.

Mots clés: Nanostructured dielectrics; Plasma process; RF MEMS capacitive switches; Silicon nanoparticles; Silicon oxynitride layers; Silver nanoparticles; Silver nanoparticles (AgNps); Dielectric materials; Silver; Electrostatic actuation; Silicon oxides; Silicon nitride; Nanotechnology; Nanoparticles; Metal nanoparticles; Electrostatics; Electrostatic actuators

Domaines: Physique [physics]; Sciences de l'ingénieur [physics]

Kremena Makasheva, Christina Villeneuve-Faure, Caroline Bonafos, Christian Laurent, Alessandro Pugliara, et al.. Dielectric engineering of nanostructured layers preventing electrostatic charging in thin dielectrics. Nanotechnology Materials and Devices Conference (NMDC), 2015 IEEE, Sep 2015, Anchorage, United States. ⟨10.1109/NMDC.2015.7439236⟩. ⟨hal-01763535⟩