Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Benattou Sadani 1 Benjamin Boisnard 1 Xavier Lafosse 2 Thierry Camps 1 Jean-Baptiste Doucet 3 Emmanuelle Daran 3 Cyril Paranthoen 4 Christophe Levallois 4 Laurent Dupont 5, 6 Sophie Bouchoule 2 Véronique Bardinal 1
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 C2N - Centre de Nanosciences et de Nanotechnologies [Marcoussis]
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
4 Institut FOTON - Institut des Fonctions Optiques pour les Technologies de l'informatiON
5 IMT Atlantique - IMT Atlantique Bretagne-Pays de la Loire
6 IMT Atlantique - OPT - Département Optique
Abstract : A simple technology is demonstrated for wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55µm tunable Fabry-Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102nm with only 18V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward large-scale integration of widely-tunable photonic devices such as VCSELs using LC technology.
Keywords : dry thick resist grating nanoimprint wafer-scale fabrication tunable optical filter liquid crystal devices film VCSEL SU-8 soft transfer
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Journal articles
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https://hal.laas.fr/hal-01839878
Contributor : Véronique Bardinal <>
Submitted on : Monday, July 16, 2018 - 10:17:49 AM
Last modification on : Saturday, October 26, 2019 - 1:32:22 AM
Long-term archiving on : Wednesday, October 17, 2018 - 1:46:00 PM

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LAAS | INSA-TOULOUSE | LAAS-MICA | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | UNIV-PARIS-SACLAY | IMT-ATLANTIQUE | LAAS-TEAM | FOTON | FOTON_OHM | FOTON-INSA | UNIV-RENNES1 | INSA-RENNES | UNIV-RENNES | INSA-GROUPE | UNIV-PARIS7 | USPC | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

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Benattou Sadani, Benjamin Boisnard, Xavier Lafosse, Thierry Camps, Jean-Baptiste Doucet, et al.. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices. IEEE Photonics Technology Letters, Institute of Electrical and Electronics Engineers, 2018, 30 (15), pp.1388-1391. ⟨10.1109/LPT.2018.2849641⟩. ⟨hal-01839878⟩

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