Selective oxidation of AlGaAs for confinement in III-V photonic devices

Document type :
Conference papers
Complete list of metadatas

https://hal.laas.fr/hal-01855298
Contributor : Guilhem Almuneau <>
Submitted on : Tuesday, August 7, 2018 - 4:12:39 PM
Last modification on : Friday, January 10, 2020 - 9:10:14 PM

Identifiers

  • HAL Id : hal-01855298, version 1

Citation

Guilhem Almuneau, Stéphane Calvez, Gael Lafleur, Chantal Fontaine, Alexandre Arnoult, et al.. Selective oxidation of AlGaAs for confinement in III-V photonic devices. 16th NAMIS workshop ” Micro- and nanosystems, large area electronics and biofunctionalities towards novel integrated smart systems“, Jun 2018, Oulu, Finland. 36p. ⟨hal-01855298⟩

Share

Metrics

Record views

98

Files downloads

78