New developments in inkjet of deposits carried out under localized extraction or helium

Véronique Conédéra (1) , Fabien Mesnilgrente (1) , Paul Fadel (1) , Norbert Fabre (1)

1 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

This paper presents the first results obtained by mounting on an ink-jet print head two first systems which through injection of a helium flow, allow faster ink-jet evaporation rates and higher resolution or increased droplet velocity without modifying the droplet diameter. A third type of system features extraction specifically located at the impact of the droplets onto the substrate. This avoids contamination of the machine environment while significantly improving printing resolution. In all cases, these systems allow printing at much lower temperatures and the use of inks with high-boiling point solvents.

Mots clés: localized extraction; low temperature deposition; ink-jet printing; helium flow

Domaines: Matériaux; Génie des procédés

Véronique Conédéra, Fabien Mesnilgrente, Paul Fadel, Norbert Fabre. New developments in inkjet of deposits carried out under localized extraction or helium. TechConnect World 2011. Microtech 2011, Jun 2011, Boston, MA, United States. pp.554-557. ⟨hal-01867487⟩