STUDY OF A HIGHLY LOCALIZED ACTIVATED CARBON DEPOSITION PROCESS USING INKJET PRINTING TECHNOLOGY

Véronique Conédéra (1) , Fabien Mesnilgrente (1) , Magali Brunet (2) , Mathias Borella (3) , Norbert Fabre (1)

1 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
2 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
3 Altatech Semiconductor

An activated carbon deposition technique based on inkjet printing is proposed for the fabrication of supercapacitors electrodes. By mastering the activated carbon suspension in ethylene glycol through the use of a surfactant and by functionalizing the substrate with OTS, 10µm wide structures were obtained with 50 µm ink jet nozzles.

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux

Véronique Conédéra, Fabien Mesnilgrente, Magali Brunet, Mathias Borella, Norbert Fabre. STUDY OF A HIGHLY LOCALIZED ACTIVATED CARBON DEPOSITION PROCESS USING INKJET PRINTING TECHNOLOGY. Journées Nationales sur les Technologies Emergentes en Micro-nanofabrication, Nov 2008, Toulouse, France. 2p. ⟨hal-01867610⟩