Realization of an Asymmetric Interdigitated Electrochemical Micro-Capacitor Based on Carbon Nanotubes and Manganese Oxide

Ty Mai Dinh (1) , Fabien Mesnilgrente (2) , Véronique Conédéra (2) , Nana Amponsah Kyeremateng (1) , David Pech (1)

1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

Asymmetric interdigitated micro-supercapacitors with high resolution, dedicated to energy storage in embedded micro-systems, are fabricated using a simple micro-fabrication process based on the inkjet printing and electrolytic deposition techniques. The process is optimized to realize a carbon nanotubes (cathode)/manganese oxide (anode) hybrid micro-device with a resolution of 100 μm. The cell capacitance reaches a value of 2.4 mF.cm−2. Moreover, the use of the asymmetric configuration allows extending the working voltage of the device from 1 V to 1.8 V in an aqueous solution.

Mots clés: MnO2; Carbon Nanotubes; Micro-Supercapacitors; Asymmetric Microdevice

Domaines: Matériaux; Matériaux; Energie électrique; Electronique

Ty Mai Dinh, Fabien Mesnilgrente, Véronique Conédéra, Nana Amponsah Kyeremateng, David Pech. Realization of an Asymmetric Interdigitated Electrochemical Micro-Capacitor Based on Carbon Nanotubes and Manganese Oxide. Journal of The Electrochemical Society, 2015, 162 (10), pp.A2016 - A2020. ⟨10.1149/2.0431510jes⟩. ⟨hal-01872846⟩