Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems

Anaïs Ferris (1) , David Pech (1) , Sebastien Garbarino (2) , Daniel Guay (2)

1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
2 EMT-INRS - Énergie Matériaux Télécommunications - INRS

Thanks to their unique properties and potential applications in various smart electronic devices, micro-supercapacitors have been increasingly investigated for on-chip energy storage. In this presentation, we describe our most recent attempts to increase the areal capacitance and energy of micro-supercapacitors. We deposited hydrated ruthenium oxide onto a highly porous gold current collector to realize a 3D electrode with unprecedented performances, fully compatible with current micro-fabrication and silicon-based device technology. The resulting electrode exhibits a capacitance per surface area in excess of 3 F.cm −2 , and-for the first time-an all-solid-state micro-supercapacitor with a specific energy per surface area comparable to that of lithium-ion micro-batteries has been achieved, but with superior power and cycling stability.

Mots clés: Micro-Supercapacitors; Pseudo-capacitors; Energy Storage; Micro-fabrication; RuO2

Domaines: Matériaux; Matériaux; Energie électrique; Electronique

Anaïs Ferris, David Pech, Sebastien Garbarino, Daniel Guay. Potentialities of micro-supercapacitors as energy storage buffers in embedded micro-systems. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2016 ), May 2016, Budapest, Hungary. 4p., ⟨10.1109/DTIP.2016.7514888⟩. ⟨hal-01874763⟩