Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

T. Beauchêne , D. Lewis , F. Beaudoin , V. Pouget (1) , R. Desplats , P. Fouillat (1) , P. Perdu (2) , Marise Bafleur (3) , David Trémouilles (3)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 Nanyang Technological University [Singapour]
3 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie

This paper presents an experimental comparison of laser beam based techniques applied to a case study concerning ESD defect location. Thermal laser stimulation and non-biased optical beam induced current techniques are evaluated and discussed. Experimental results demonstrate the advantages and weak points of the two approaches.

Domaines: Electronique; Micro et nanotechnologies/Microélectronique

T. Beauchêne, D. Lewis, F. Beaudoin, V. Pouget, R. Desplats, et al.. Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization. Microelectronics Reliability, 2003, 43 (3), pp.439 - 444. ⟨10.1016/S0026-2714(02)00339-6⟩. ⟨hal-01887647⟩