Cavity Resonator Integrated Grating Filters fabricated by soft-mold nanoimprint lithography

Sylvain Augé (1) , Sylvain Pelloquin (1) , Alexandre Lauvergne (2) , Emmanuelle Daran (2) , Antoine Monmayrant (1) , Olivier Gauthier-Lafaye (1)

1 LAAS-PHOTO - Équipe Photonique
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

Cavity Resonator Integrated Filers are a novel generation of free space filters that rely on efficient coupling of a free space beam to a localized mode. We introduce the physical principles underlying their optical properties, and show that soft mold nanoimprint lithography is particularly adapted for their fabrication. We experimentally demonstrate high efficiency (50%) narrow band (300 pm) filters at 850 nm wavelength.

Domaines: Optique / photonique; Electromagnétisme; Micro et nanotechnologies/Microélectronique

Sylvain Augé, Sylvain Pelloquin, Alexandre Lauvergne, Emmanuelle Daran, Antoine Monmayrant, et al.. Cavity Resonator Integrated Grating Filters fabricated by soft-mold nanoimprint lithography. PIERS Progress In Electromagnetics Research Symposium, Nov 2017, Singapore, Singapore. ⟨hal-01917382⟩