Parametric study of a microwave sensor dedicated to the dielectric spectroscopy of single particles and biological cells

W. Chen (1) , David Dubuc (1) , Katia Grenier (1)

1 LAAS-MH2F - Équipe Micro et nanosystèmes HyperFréquences Fluidiques

This paper deals with a parametric study of a sensor dedicated to the microwave dielectric spectroscopy of individual particles or biological cells. The sensor is based on a coplanar topology with a capacitive gap and an embedded trap placed on top to precisely localize the particles or cells of interest. Various parameters such as the width of the capacitive gap, particle size and relative permittivity have been evaluated through simulations and validated with measurements. This study enables the optimization of the sensor in term of sensitivity.

Mots clés: Sensor; biological cells; coplanar waveguide; microwave; dielectric spectroscopy; particles

Domaines: Electromagnétisme; Micro et nanotechnologies/Microélectronique; Imagerie

W. Chen, David Dubuc, Katia Grenier. Parametric study of a microwave sensor dedicated to the dielectric spectroscopy of single particles and biological cells. European Microwave Conference (EuMC 2015), Sep 2015, Paris, France. pp.829-832, ⟨10.1109/EuMC.2015.7345892⟩. ⟨hal-01951658⟩