Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry

Fei Wang (1) , Damien Ducatteau (1) , David Troadec (1) , Hassan Tanbakuchi (2) , Bernard Legrand (3) , Gilles Dambrine (1) , Clément Nicolas (1) , Didier Theron (1)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 Agilent Technologies
3 LAAS-MEMS - Équipe Microsystèmes électromécaniques

Domaines: Micro et nanotechnologies/Microélectronique

Fei Wang, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, Bernard Legrand, et al.. Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry. European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom. ⟨hal-01962209⟩