Driving and sensing M/NEMS flexural vibration using dielectric transduction
Résumé
We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and electrically detected by charge measurement at megahertz frequencies. The displacement was also checked by optical interferometry, and the electromechanical transduction efficiency is extracted and compared to an analytical modelling.