Guided SH-SAW sensor based on DWNTs sensitive material for VOCs and humidity detection

Hamida Hallil (1) , Qing Zhang (2, 3) , Emmanuel Flahaut (4) , Jean-Luc Lachaud (1) , Philippe Coquet (5) , Corinne Dejous (1) , Dominique Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 NTU - Nanayang Technological University
3 CINTRA - CNRS International - NTU - Thales Research Alliance
4 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
5 CINTRA / SEEE Nanyang Technological University

This work focuses on the application related to the detection of low moisture and environmental pollutants. A novel gas sensor with inkjet printed Double Walled Carbon Nano Tubes (DWNTs) on a guided SH-SAW (Love wave) sensor platform was developed for Volatile Organic Compounds (VOCs) and humidity detection application. The experiments were conducted in real-time at ambient conditions. Results demonstrate the adsorption of vapor compounds on DWNTs sensitive material and leads for example to frequency shifts of 1.97 kHz and 2.93 kHz with 120 ppm of ethanol vapor and 6.22 % RH, respectively.

Mots clés: Love wave device; gas sensor; SH-SAW platform; CNTs; DWNTs

Domaines: Micro et nanotechnologies/Microélectronique; Instrumentations et Détecteurs [physics.ins-det]

Hamida Hallil, Qing Zhang, Emmanuel Flahaut, Jean-Luc Lachaud, Philippe Coquet, et al.. Guided SH-SAW sensor based on DWNTs sensitive material for VOCs and humidity detection. Journal of Integrated Circuits and Systems, 2018, 13 (3), pp.1-4. ⟨10.29292/jics.v13i3.32⟩. ⟨hal-01999495⟩