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Numerical Simulations for Sensitivity Analysis of the Electrostatic Force Curve on Charge Localization in 3D

M. Azib 1 F. Baudoin 1 C. Villeneuve-Faure 1 G. Teyssèdre 1 Nicolas Binaud 2 Florian Bugarin 2 Stéphane Segonds 2
1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
2 ICA - Institut Clément Ader
Abstract : In the present work we present a model for Atomic Force Microscopy (AFM) tip interacting electrostatically with a thin dielectric layer. Numerical simulations enabled us to estimate the electrostatic force induced by a half-ellipsoid charge distribution. The sensitivity of the shape of the Electrostatic Force Distance Curves (EFDC) to charge localization is investigated for the charge parameters as radius, depth and density of charges.
Keywords : AFM space charge localization numerical simulations thin dielectric films
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Conference papers
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https://hal.archives-ouvertes.fr/hal-02005747
Contributor : Nicolas Binaud <>
Submitted on : Monday, February 4, 2019 - 11:31:11 AM
Last modification on : Monday, November 30, 2020 - 11:19:45 AM

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CNRS | INSA-TOULOUSE | ICA | INSA-GROUPE | UNIV-TLSE3 | TBI | LAPLACE | INSTITUT-TELECOM

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M. Azib, F. Baudoin, C. Villeneuve-Faure, G. Teyssèdre, Nicolas Binaud, et al.. Numerical Simulations for Sensitivity Analysis of the Electrostatic Force Curve on Charge Localization in 3D. 2018 IEEE 2nd International Conference on Dielectrics (ICD), Jul 2018, Budapest, Hungary. pp.1-4, ⟨10.1109/ICD.2018.8514685⟩. ⟨hal-02005747⟩

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