An industrializable Silicon-based microhotplate for metal oxides gas sensors

P. Yoboué (1) , A. Konaté (1) , O. Asseu (2) , Philippe Menini (3)

1 Ecole Supérieure Africaine des Technologies d’Information et de Communication
2 INP-HB - Institut National Polytechnique Félix Houphouët-Boigny [Yamoussoukro]
3 LAAS-MICA - Équipe MICrosystèmes d'Analyse

This article presents an industrializable silicon-based microhotplate for metal oxide gas sensors. It introduces an interesting approach and describes the technological optimizations used to reach high and stable operating temperature, in reducing intrinsic drift problems (due to commercial polysilicon heater). The microhotplate present low consumption of 70 mW for 600°C, good thermal homogeneity over the active area and a good mechanical stability.

Mots clés: Industrializable; Micro technology; Commercial gas sensors; Microhotplates; Platinum; Metal oxides

Domaines: Micro et nanotechnologies/Microélectronique

P. Yoboué, A. Konaté, O. Asseu, Philippe Menini. An industrializable Silicon-based microhotplate for metal oxides gas sensors. Physical and Chemical News, 2014, 72, pp.34 - 41. ⟨hal-02045580⟩