A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits

E. Saint-Etienne Patrick Pons 1 G. Blasquez 1 Pierre Temple-Boyer 1 Véronique Conédéra 2 Monique Dilhan 2 X. Chauffleur 1 Philippe Menini 3 R. Plana 1 T. Parra B. Guillon J.C. Lalaurie
1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : This paper presents a new technological process to implement efficient millimetre-wave passive circuits on a silicon substrate. This process associates a thick positive photoresist acting as a mould for the realization of thick conductors (several microns) with an ultra-thin dielectric membrane using only two layers (SiO2/Si2N3.8) in order to reduce both dielectric and ohmic losses in the coplanar millimetre-wave circuits. Coplanar transmission lines and a band-pass filter in the 30 GHz range, featuring respectively transmission losses lower than 0.2 and 1 dB, illustrate some potentialities of this process.
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Journal articles
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https://hal.archives-ouvertes.fr/hal-02045991
Contributor : Philippe Menini <>
Submitted on : Friday, February 22, 2019 - 2:25:56 PM
Last modification on : Saturday, October 26, 2019 - 1:30:11 AM

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CNRS | INSA-TOULOUSE | LAAS-MICA | LAAS | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | INSA-GROUPE | LAAS-TEAM | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

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E. Saint-Etienne, Patrick Pons, G. Blasquez, Pierre Temple-Boyer, Véronique Conédéra, et al.. A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits. Sensors and Actuators A: Physical , Elsevier, 1998, 68 (1-3), pp.435-441. ⟨10.1016/S0924-4247(98)00073-9⟩. ⟨hal-02045991⟩

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