Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration

Lionel Presmanes 1 Y. Thimont 1 Audrey Chapelle 2 Frédéric Blanc 3 Chabane Talhi 3 C Bonningue 1 A Barnabé 1 Philippe Menini 2 Ph Tailhades 1
1 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Micro-hotplates have been first prepared by using silicon microtechnologies onto a thin membrane, it was then possible to generate very fast temperature variations (from room temperature to 550 ° C in 25ms) and a rapid temperature cycled mode could be applied. A low cost and reliable stencil mask method has been developed and successfully tested during the integration of ZnO:Ga layer. The variation of the resistance of this 50 nm thick sensitive layer has been measured under 500 ppb of acetaldehyde (C 2 H 4 O). The very high response obtained was between 10 and 1000 depending on the working temperature.
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https://hal.archives-ouvertes.fr/hal-02046290
Contributor : Philippe Menini <>
Submitted on : Friday, February 22, 2019 - 3:40:00 PM
Last modification on : Saturday, October 26, 2019 - 1:31:44 AM
Long-term archiving on: Thursday, May 23, 2019 - 3:13:51 PM

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  • HAL Id : hal-02046290, version 1

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CNRS | INSA-TOULOUSE | LAAS-MICA | LAAS | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | INSA-GROUPE | INC-CNRS | LAAS-I2C | UNIV-TLSE3 | UT1-CAPITOLE | UNIV-TLSE2

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Lionel Presmanes, Y. Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi, et al.. Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration. EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-02046290⟩

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