Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration

Lionel Presmanes (1) , Y. Thimont (1) , Audrey Chapelle (2) , Frédéric Blanc (3) , Chabane Talhi (3) , C Bonningue (1) , A Barnabé (1) , Philippe Menini (2) , Ph Tailhades (1)

1 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
3 LAAS-I2C - Service Instrumentation Conception Caractérisation

Micro-hotplates have been first prepared by using silicon microtechnologies onto a thin membrane, it was then possible to generate very fast temperature variations (from room temperature to 550 ° C in 25ms) and a rapid temperature cycled mode could be applied. A low cost and reliable stencil mask method has been developed and successfully tested during the integration of ZnO:Ga layer. The variation of the resistance of this 50 nm thick sensitive layer has been measured under 500 ppb of acetaldehyde (C 2 H 4 O). The very high response obtained was between 10 and 1000 depending on the working temperature.

Domaines: Micro et nanotechnologies/Microélectronique

Lionel Presmanes, Y. Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi, et al.. Integration by shadow mask process of ZnO:Ga sputtered layers onto microsensor platform for detection of sub-ppm acetaldehyde concentration. EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-02046290⟩