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Selective GAS sensor based on screen-printed ZNO nanorods

Abstract : Screen-printing processes offer many advantages in precise control of thickness and chemical composition of films, totally compatible with MEMS technology, and low-cost for large-scale production. This technic is widely used in the field of gas sensors since many years [1,2] but mostly used to elaborate thick films for heating resistance than sensing element based on semiconducting oxides. Metal oxide thin film sensors have been widely used for gas sensing applications thanks to their sensitivity toward a large variety of gases [3], but they suffer from a lack of selectivity. One method to overcome this problem consists in using a temperature modulation of the sensor, by changing the power consumption [4,5]. This kind of profile allows fast chemical reaction changes, and consequently fast gas sensitivities changes while maintaining the integrity of the material. This work demonstrate the feasibility of well controlled films of a ZnO nanostructured sensing material deposited by screen printing technique on microhotplate and the sensing performances by using specific profile associated to the temperature and bias current modulation.
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https://hal.archives-ouvertes.fr/hal-02048003
Contributor : Philippe Menini <>
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Last modification on : Wednesday, March 24, 2021 - 4:38:02 PM
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  • HAL Id : hal-02048003, version 1

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Audrey Chapelle, Samuel Charlot, Véronique Conédéra, J. Jonca, Myrtil L. Kahn, et al.. Selective GAS sensor based on screen-printed ZNO nanorods. SENSORS, ENERGY HARVESTING, WIRELESS NETWORK &SMART OBJECTS CONFERENCE 2015 (SENSO2015), Oct 2015, Gardanne, France. ⟨hal-02048003⟩

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