Capacitive Pressure Sensor Mock-up Without Compensation Circuits

G. Blasquez 1 Patrick Pons 1 Philippe Menini 2 D. Herbst M. Schulz B. Hofflinger 3
1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 Institut für Mikroelektronik Stuttgart
Abstract : A pressure sensor mock-up has been fabricated with an integrated capacitive pressure sensing cell and a CMOS switched capacitor circuit to evaluate the feasibility of sensors requiring no compensation circuits for the thermal drift and noulinearities. The measurements made on this demonstrator and the analysis of potential improvements show that it must be possible to develop a sensor featuring : a linear response, an accuracy in the order of a few percents, a power consumption of 7.5 mW for a 5V supply voltage
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https://hal.laas.fr/hal-02060535
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UNIV-TLSE3 | CNRS | INSA-TOULOUSE | LAAS | LAAS-MICA | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | INSA-GROUPE | UT1-CAPITOLE | UNIV-TLSE2

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G. Blasquez, Patrick Pons, Philippe Menini, D. Herbst, M. Schulz, et al.. Capacitive Pressure Sensor Mock-up Without Compensation Circuits. International Solid-State Sensors and Actuators Conference (TRANSDUCERS '95), Jun 1995, Stockholm, Sweden. pp.628-631, ⟨10.1109/SENSOR.1995.717308⟩. ⟨hal-02060535⟩

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