%0 Conference Proceedings
%T Capacitive Pressure Sensor Mock-up Without Compensation Circuits
%+ Laboratoire d'analyse et d'architecture des systèmes (LAAS)
%+ Équipe MICrosystèmes d'Analyse (LAAS-MICA)
%+ Institut für Mikroelektronik Stuttgart
%A Blasquez, G.
%A Pons, Patrick
%A Menini, Philippe
%A Herbst, D.
%A Schulz, M.
%A Hofflinger, B.
%< avec comité de lecture
%Z Rapport LAAS n° 95259
%B International Solid-State Sensors and Actuators Conference (TRANSDUCERS '95)
%C Stockholm, Sweden
%I IEEE
%3 Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
%V 1
%P 628-631
%8 1995-06-25
%D 1995
%R 10.1109/SENSOR.1995.717308
%Z Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsConference papers
%X A pressure sensor mock-up has been fabricated with an integrated capacitive pressure sensing cell and a CMOS switched capacitor circuit to evaluate the feasibility of sensors requiring no compensation circuits for the thermal drift and noulinearities. The measurements made on this demonstrator and the analysis of potential improvements show that it must be possible to develop a sensor featuring : a linear response, an accuracy in the order of a few percents, a power consumption of 7.5 mW for a 5V supply voltage
%G English
%2 https://hal.laas.fr/hal-02060535/document
%2 https://hal.laas.fr/hal-02060535/file/version%20auteur.pdf
%L hal-02060535
%U https://hal.laas.fr/hal-02060535
%~ UNIV-TLSE3
%~ CNRS
%~ INSA-TOULOUSE
%~ LAAS
%~ LAAS-MICA
%~ LAAS-MICRO-NANO-BIO-TECHNOLOGIES
%~ INSA-GROUPE
%~ UT1-CAPITOLE
%~ UNIV-TLSE2