Design and Characterization of a Micromachined Receiver for W Band Applications

Alina-Cristina Bunea (1) , Dan Neculoiu (1) , Alexandru Takacs (2) , Pierre-François Calmon (3)

1 IMT Bucharest
2 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

This paper presents for the first time the design, electromagnetic modeling and simulation of a W-band micromachined receiver with a double folded slot antenna. The antenna was processed on a thin dielectric membrane obtained through wet micromachining of a 400 µm thick, high-resistivity silicon substrate. A stand-alone antenna structure was fabricated and characterized in terms of reflection losses, showing a working band (defined for |S11|<-10 dB) between 88.3-105.8 GHz, in good agreement with simulations. The maximum simulated directivity at 94 GHz is 6.3 dBi. The direct conversion receiver uses a hybrid integrated GaAs zero bias detector diode. Two new parameters based on the incident isotropic power are introduced: isotropic voltage sensitivity and isotropic tangential signal sensitivity. The measured isotropic tangential sensitivity is lower than-40 dBm between 80-105 GHz, for a 10 kHz video bandwidth.

Mots clés: direct detection receivers; slot antennas; W band; zero bias detectors

Domaines: Electromagnétisme

Alina-Cristina Bunea, Dan Neculoiu, Alexandru Takacs, Pierre-François Calmon. Design and Characterization of a Micromachined Receiver for W Band Applications. European Microwave Week (EuMW), Oct 2014, Rome, Italy. 4p. ⟨hal-02066088⟩