Aperture-coupled microstrip resonator for Millimeter-wave passive pressure sensors

Maria Valeria de Paolis (1) , Julien Philippe (1) , Alexandre Rumeau (2) , Anthony Coustou (2) , Samuel Charlot (3) , Patrick Pons (1) , Hervé Aubert (1)

1 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
2 LAAS-I2C - Service Instrumentation Conception Caractérisation
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

In this paper, a millimeter-wave passive pressure sensor based on an aperture-coupled microstrip resonator is proposed. The aperture-coupling technique is applied here for improving the airtightness of pressure sensors and for avoiding unwanted electromagnetic radiation occurring when using the widely used probe-fed technique. The measured additional insertion loss due to the aperture-coupling is found to be of 1.4dB only. Both 3D full-wave electromagnetic simulation results and experimental data are reported for the validation of the novel millimeter-wave sensor design.

Domaines: Electromagnétisme; Micro et nanotechnologies/Microélectronique

Maria Valeria de Paolis, Julien Philippe, Alexandre Rumeau, Anthony Coustou, Samuel Charlot, et al.. Aperture-coupled microstrip resonator for Millimeter-wave passive pressure sensors. Transducers, Jun 2019, Berlin, Germany. ⟨10.1109/TRANSDUCERS.2019.8808546⟩. ⟨hal-02083197⟩