Development of integrated smart nose based on WO3 gas sensors

H. Chalabi; Philippe Menini; Emmanuel Scheid; Ludovic Salvagnac; Véronique Conédéra; Khalifa Aguir

Conference papers

Development of integrated smart nose based on WO3 gas sensors

H. Chalabi ¹ Philippe Menini ^{2, 3} Emmanuel Scheid ¹ Ludovic Salvagnac ⁴ Véronique Conédéra ⁴ Khalifa Aguir ⁵

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes

2 LAAS-MICA - Équipe MICrosystèmes d'Analyse

LAAS - Laboratoire d'analyse et d'architecture des systèmes

3 LAAS-M2D

LAAS - Laboratoire d'analyse et d'architecture des systèmes

4 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

LAAS - Laboratoire d'analyse et d'architecture des systèmes

5 L2MP - Laboratoire matériaux et microélectronique de Provence

Abstract : This article deals with the conception and realisation of a new architecture of integrated electronic nose based on silicon microhotplates and WO 3 thin films. The first part of this work describes technological choices to elaborate a single gas sensor with low consumption (˜100 mW to reach 600°C), low thermal inertia (˜30ms), above all with a good heater stability. By consideration of response times and relative resistance variations from sensor response curves, it is possible firstly to discriminate different gas mixtures and secondly to evaluate gas concentrations by using mathematical analysis.

Keywords : Microtechnology Semi-conducting Gas Sensors Electronic nose WO 3 Thin film

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal.laas.fr/hal-02087150
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Submitted on : Monday, April 1, 2019 - 7:34:28 PM
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