High performances of new microhotplate for gas sensors

Philippe Menini 1 Habib Chalabi 1 P. Yoboué 1 E. Scheid 1 Véronique Conédéra 2 Ludovic Salvagnac 1 Khalifa Aguir 3
1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
Abstract : The main goal of this work is to improve significantly performances of microhotplate for gas sensors. This article describes technological optimizations (materials and design) used to reach high and stable operating temperature, in reducing intrinsic drift problems (linked to standard polySilicon heater). Our heating platforms present low buckling effect, low consumption and good thermal homogeneity all over the active area.
Keywords : Microtechnology microhotplate semi-conducting gas sensors
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Conference papers
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https://hal.laas.fr/hal-02099850
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Philippe Menini, Habib Chalabi, P. Yoboué, E. Scheid, Véronique Conédéra, et al.. High performances of new microhotplate for gas sensors. 22nd European Conference on Solid state Transducers (EUROSENSORS XXII), Sep 2008, DRESDEN, Germany. ⟨hal-02099850⟩

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