Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures

Abstract : The main goal of this work is to realize a metal oxide gas sensor with stable operating temperature. This article describes our approach and the technological process used to reach a high and stable operating temperature (650-700°C), with low consumption (100mW) and good thermal homogeneity all over the active area.
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https://hal.laas.fr/hal-02099873
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Submitted on : Wednesday, June 19, 2019 - 6:59:15 PM
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  • HAL Id : hal-02099873, version 2

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P. Yoboué, Philippe Menini, Habib Chalabi, Véronique Conédéra, Ludovic Salvagnac, et al.. Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures. MICROMECHANICS EUROPE 2007, Sep 2007, Guimaraes, Portugal. pp.191-194. ⟨hal-02099873v2⟩

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