Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures

P. Yoboué Philippe Menini 1 Habib Chalabi 2 Véronique Conédéra 3 Ludovic Salvagnac 3 Emmanuel Scheid
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The main goal of this work is to realize a metal oxide gas sensor with stable operating temperature. This article describes our approach and the technological process used to reach a high and stable operating temperature (650-700°C), with low consumption (100mW) and good thermal homogeneity all over the active area.
Keywords : Microhotplates gas sensors Micro-hotplates Semi-conducting gas sensor nano-particles Micro-cavity Tin oxides Micro technology inter-digitized electrodes
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Conference papers
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https://hal.laas.fr/hal-02099873
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  • HAL Id : hal-02099873, version 2

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UNIV-TLSE3 | CNRS | LAAS-TEAM | INSA-TOULOUSE | LAAS-MICA | LAAS | LAAS-MICRO-NANO-BIO-TECHNOLOGIES | INSA-GROUPE | UT1-CAPITOLE | UNIV-TLSE2

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P. Yoboué, Philippe Menini, Habib Chalabi, Véronique Conédéra, Ludovic Salvagnac, et al.. Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures. MICROMECHANICS EUROPE 2007, Sep 2007, Guimaraes, Portugal. pp.191-194. ⟨hal-02099873v2⟩

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