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Conference papers
Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures
Abstract : The main goal of this work is to realize a metal oxide gas sensor with stable operating temperature. This article describes our approach and the technological process used to reach a high and stable operating temperature (650-700°C), with low consumption (100mW) and good thermal homogeneity all over the active area.
Cited literature [7 references]
https://hal.laas.fr/hal-02099873
Contributor : Philippe Menini <>
Submitted on : Wednesday, June 19, 2019 - 6:59:15 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
Contributor : Philippe Menini <>
Submitted on : Wednesday, June 19, 2019 - 6:59:15 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM
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ABSTRACTmme07-vf (1).pdf
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