Computational study of a novel Knudsen pump design exploiting drilling and 3D printing techniques in low thermal conductivity materials

Guillermo López Quesada (1, 2) , Giorgos Tatsios (2) , Stéphane Colin (1) , Dimitris Valougeorgis (2) , Lucien Baldas (1) , Christine Barrot (1) , Marcos Rojas-Cárdenas (1)

1 ICA - Institut Clément Ader
2 UTH - University of Thessaly [Volos]

Mots clés: kinetic modeling; Vacuum micropump; thermal transpiration

Domaines: Milieux fluides et réactifs; Micro et nanotechnologies/Microélectronique

Guillermo López Quesada, Giorgos Tatsios, Stéphane Colin, Dimitris Valougeorgis, Lucien Baldas, et al.. Computational study of a novel Knudsen pump design exploiting drilling and 3D printing techniques in low thermal conductivity materials. 6th Micro and Nano Flows Conference, Professor Srinivas Garimella, Georgia Institute of Technology, Sep 2018, Atlanta, United States. pp.9 - 12. ⟨hal-02105734⟩