Characterization of Dynamic Measurements with Nanoparticular SnO 2 Gas Sensors

Cyril Tropis (1) , Philippe Menini (1) , A. Martinez (1) , P. Yoboué (1) , Frédéric Blanc (1) , Bernard Franc (1) , Paul Fadel (2) , Denis Lagrange (1) , Pierre Fau (3) , André Maisonnat (3)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
3 LCC - Laboratoire de chimie de coordination

A temperature step dynamic measurement on a nanoparticular SnO2 gas sensor is studied. Different sequences applied on the heater sensor are investigated to determine the best way to have a reproducible response. The sensor performances are then compared for CO detection in isotherm mode and in dynamic mode, with the previously highlighted sequence. A characterization of the step length is also led to its influence on sensor sensitivity. Finally, the best temperature profile to use for dynamic measurements is presented to improve significantly sensor sensitivity, reproducibility and stability.

Mots clés: SnO2 gas sensor; Pulsed temperature step; CO sensitivity

Domaines: Micro et nanotechnologies/Microélectronique

Cyril Tropis, Philippe Menini, A. Martinez, P. Yoboué, Frédéric Blanc, et al.. Characterization of Dynamic Measurements with Nanoparticular SnO 2 Gas Sensors. Micromechanics Europe (MME), Sep 2009, Toulouse, France. 4p. ⟨hal-02160492⟩