New Generation of Micro Machined Silicon Gas Sensors:Nano-structured Pd-and Pt-doped Tin Dioxide Sensitive Layers for the Detection of Hazardous Gases

Abstract : In the present work, we demonstrate that organometallic complexes constitute efficient precursors to design nanostructured Pd-or Pt-doped tin dioxide material. We demonstrate also that this material, under the form of colloidal solutions, can be implemented at an industrial scale as sensitive layer by drop deposition process onto micro-machined silicon substrates. Responses of these sensors to CO, H2 , C3H8 and NO2 are presented and discussed.
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André Maisonnat, Hervé Delprat, Marc Baumbach, Andreas Schütze, Fei Cheng, et al.. New Generation of Micro Machined Silicon Gas Sensors:Nano-structured Pd-and Pt-doped Tin Dioxide Sensitive Layers for the Detection of Hazardous Gases. Eurosensors XVIII, Sep 2004, Rome, Italy. pp.636. ⟨hal-02160588⟩

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