METHOD OF C2 H4 DETECTION IN HUMID ATMOSPHERES USING A NANOPARTICULAR SnO2 GAS SENSOR

M. Guerrero (1) , Philippe Menini (2) , Laurent Erades , A. Martinez (1)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse

Microhotplate architectures are widely studied in metal-oxide based sensors since their small size gives some advantages against traditional Taguchi type structures. The fast capability to vary sensors operating temperature allows to get information at different temperatures in short time periods and to extract transient information related to chemical adsorption and desorption processes. In this work, we present actual results in the development of a system, where a microhotplate architecture and synthesised nanoparticular SnO 2 like sensing material are used to identify ethylene (C2H4) in controlled humid atmospheres. Temperature modulation and Factorial Discriminant Analysis are used in the identification process. Low concentrations of C2H4 (0;1;2;5 ppm) have been identified in controlled high relative humidity ambiances.

Mots clés: Tin oxide; gas sensor; temperature modulation; Factorial Discriminant Analysis Subject category: Chemical sensors and signal processing

Domaines: Micro et nanotechnologies/Microélectronique

M. Guerrero, Philippe Menini, Laurent Erades, A. Martinez. METHOD OF C2 H4 DETECTION IN HUMID ATMOSPHERES USING A NANOPARTICULAR SnO2 GAS SENSOR. 16th International Conference on Solid State transducers (Eurosensors XVI), Sep 2002, Prague, Czech Republic. pp.1019. ⟨hal-02160607⟩