New Technological advances for microshielded coplanar circuits on silicon

E Saint Etienne; G Blasquez; Patrick Pons; Robert Plana; C Douziech; P Favaro; Philippe Menini; Norbert Fabre; Jacques Graffeuil; Thierry Parra; Jc Lalaurie

New Technological advances for microshielded coplanar circuits on silicon

E Saint Etienne ¹ G Blasquez ¹ Patrick Pons ¹ Robert Plana ¹ C Douziech ¹ P Favaro ¹ Philippe Menini ² Norbert Fabre ³ Jacques Graffeuil ¹ Thierry Parra ¹ Jc Lalaurie ⁴

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes

2 LAAS-MICA - Équipe MICrosystèmes d'Analyse

LAAS - Laboratoire d'analyse et d'architecture des systèmes

3 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

LAAS - Laboratoire d'analyse et d'architecture des systèmes

4 CNES - Centre National d'Études Spatiales [Toulouse]

Abstract : An advanced technological process for microwave coplanar circuits on silicon oxide/nitride membrane is presented. This process allows to make thick conductors with high geometric definition. Furthermore, it permits to realise microshielded circuits with minimised losses in the access ports.

Keywords : microwaves technology Silicon

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal.laas.fr/hal-02170319
Contributor : Philippe Menini <>
Submitted on : Monday, July 1, 2019 - 6:22:54 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM

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