E Saint Etienne 1
Author
G Blasquez 1
Author
Patrick Pons 1
Author IdHAL : pons-patrick ORCID : https://orcid.org/0000-0002-7989-3272
Robert Plana 1
Author
C Douziech 1
Author
P Favaro 1
Author
Philippe Menini 2
Author Employer institution : Équipe MICrosystèmes d'Analyse IdHAL : philippe-menini ORCID : https://orcid.org/0000-0002-7532-9148
Norbert Fabre 3
Author