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Thermal Drifts due to Thermomechanical Deformations in Capacitive Pressure Sensors

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https://hal.laas.fr/hal-02171806
Contributor : Philippe Menini <>
Submitted on : Wednesday, July 3, 2019 - 11:08:08 AM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM

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  • HAL Id : hal-02171806, version 1

Citation

G Blasquez, X Chauffleur, Patrick Pons, Philippe Menini, Patrick Favarro. Thermal Drifts due to Thermomechanical Deformations in Capacitive Pressure Sensors. Eurosensors XII, Sep 1998, Southampton, United Kingdom. pp.411-414. ⟨hal-02171806⟩

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