R. J. Fleming, Space charge profile measurement techniques: recent advances and future directions, IEEE Trans. Dielectr. Electr. Insul, vol.12, p.967, 2005.

A. Imburgia, R. Miceli, R. Sanseverino, E. , R. P. Viola et al., Review of space charge measurement systems: Acoustic, thermal and optical methods, IEEE Trans. Dielectr. Electr. Insul, vol.23, p.3126, 2016.

T. Maeno and K. Fukunaga, High-resolution PEA charge distribution measurement system, IEEE Trans. Dielec. Electr. Insul, vol.3, p.754, 1996.

A. Petre, D. Marty-dessus, L. Berquez, and J. L. Franceschi, Three-dimensional space charge cartographies by FLIMM in electron irradiated polymers, J. Appl. Phys, vol.43, p.2572, 2004.

G. C. Stevens and P. J. Baird, Nano-and Meso-measurement methods in the study of dielectrics, IEEE Trans. Dielectr. Electr. Insul, vol.12, p.979, 2005.

L. Boyer, O. Fruchier, P. Notingher, S. Agnel, B. Rousset et al., Analysis of data obtained using the thermal-step method on a MOS structure -An electrostatic approach, IEEE Trans. Ind. Appl, vol.46, p.1144, 2010.
URL : https://hal.archives-ouvertes.fr/hal-01629118

M. Ishii, Static states and dynamic behaviour of charges : observation and control by scanning probe microscopy, J. Phys.: Condens. Matter, vol.22, p.173001, 2010.

B. Terris, J. Stern, D. Rugar, and H. Manin, Contact electrification using force microscopy, Phys. Rev. Lett, vol.63, p.2669, 1989.

S. Sadewasser and T. Glatzel, Kelvin Probe Force Microscopy: Measuring and Compensating Electrostatic Forces, Springer Series in Surface Sciences 48, 2012.

H. O. Jacobs, P. Leuchtmann, O. J. Homan, and A. Stemmer, Resolution and contrast in Kelvin probe force microscopy, J. Appl. Phys, vol.84, p.1168, 1998.

M. Bieletzki, T. Hynninen, T. Soini, M. Pivetta, C. Henry et al., Topography and work function measurements of thin MgO(001) films on Ag(001) by nc-AFM and KPFM, Phys. Chem. Chem. Phys, vol.12, p.3203, 2010.

C. Barth and C. R. Henry, Kelvin probe force microscopy on surfaces of UHV cleaved ionic crystals Nanotechn, vol.17, p.5155, 2006.

L. Borowik, K. Koku, T. D. Melin, and T. , Calculating Kelvin force microscopy signals from static force field, Appl. Phys. Lett, vol.96, p.103119, 2010.

C. Rezende, R. Gouveia, M. Da-silva, and F. Galembeck, Detection of charge distributions in insulator surfaces, J. Phys.: Condens. Matter, vol.21, p.263002, 2009.

M. Saint-jean, S. Hudlet, C. Guthmann, and J. Berger, Charge dynamics and time evolution of contact potential studied by atomic force microscopy, Phys. Rev. B, vol.56, p.15391, 1997.

J. M. Muller, E. M. Marohn, and J. A. , Time-resolved Electrostatic Force Microscopy of Charge Trapping in Polycrystalline Pentacene, J. Phys. Chem. B, vol.111, p.7711, 2007.

T. N. Ng, W. R. Silveira, and J. A. Marohn, Dependence of charge injection on temperature, electric field and energetic disorder in an organic semiconductor, Phys. Rev. Lett, vol.98, p.66101, 2007.

D. M. Taylor, D. Morris, and J. A. Cambridge, Time evolution of the electric field at electrode interfaces with conducting polymers, Appl. Phys. Lett, vol.85, p.5266, 2004.

W. R. Silveira and A. Marohn, Microscopic view of charge injection in an organic semiconductor, Phys. Rev. Lett, vol.93, p.116104, 2004.

T. J. Lewis, Nanometric Dielectrics IEEE Trans. Dielectr. Electr. Insul, vol.1, p.812, 1994.

T. Mizutani, Y. Takai, T. Osawa, and M. Ieda, Barrier heigths and surface states of metalpolymer (PET) contacts, J. Phys. D: Appl. Phys, vol.9, p.2253, 1976.

U. Zaghloul, G. J. Papaioannou, F. Coccetti, P. Pons, and R. Plana, A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy, J. Micromech. Microeng, vol.20, p.64016, 2010.

T. R. Albrecht, P. Grutter, D. Horne, and D. Rugar, Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity, J. Appl. Phys, vol.69, p.668, 1991.

, COMSOL Multiphysics 5.1.1, vol.145, 2014.

F. Emmerich and C. Thielemann, Real-space measurement of potential distribution in PECVD ONO electrets by KPFM, Nanotechnology, vol.27, p.205703, 2016.

K. Faliya, H. Kliem, and C. J. Dias, Investigations of Space Charge Distributions by Atomic Force Microscope, Proc. IEEE International Conference on Dielectrics, p.219, 2016.

S. Sadewasser, C. Leendertz, F. Streicher, M. Lux-steiner, and . Ch, The influence of surface topography on Kelvin Probe Force Microscopy Nanotechnology, vol.20, p.505503, 2009.

S. Bardet, M. Popoff, H. Diesinger, D. Deresmes, D. Theron et al., Cross-talk artefacts in Kelvin probe force microscopy imaging: a comprehensive study, J. Appl. Phys, vol.115, p.144313, 2014.

M. M. Perlman, T. J. Sonnonstine, and J. A. St-pierre, Drift mobility determinations using surface potential decay in insulators, J. Appl. Phys, vol.47, p.5016, 1976.

J. Lambert, G. De-loubens, C. Guthmann, and M. Saint-jean, Dispersive charge transport along the surface of an insulating layer observed by electrostatic force microscopy, Phys. Rev. B, vol.71, p.155418, 2005.
URL : https://hal.archives-ouvertes.fr/hal-00126247

N. F. Mott, Conduction in Non-Crystalline Materials, 1987.

I. A. Brytov, V. A. Gritsenko, and Y. Romashchenko, Short-range order and electron structure of amorphous SiNO Sov, Phys. JETP, vol.62, p.321, 1985.

C. Villeneuve-faure, K. Makasheva, C. Bonafos, B. Despax, L. Boudou et al., Kelvin force microscopy characterization of charging effect in thin a-SiO x N y :H layers deposited in pulsed plasma enhanced chemical vapor deposition process by tuning the Siliconenvironment, J. Appl. Phys, vol.113, p.204102, 2013.