Handling Geometric Features in Nanoscale Characterization of Charge Injection and Transport in thin Dielectric Films

C. Villeneuve-Faure 1 K. Makasheva 1 L. Boudou 1 G. Teyssedre 1
1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
Abstract : Due to miniaturization and attractiveness of nanosized and/or nanostructured dielectric layers, characterization at the local scale of charge injection and transport phenomena comes to the fore. To that end the electric modes derived from Atomic Force Microscopy (AFM) are more and more frequently used. In this study, the influence of AFM tip-plane system configuration on the electric field distribution is investigated for homogeneous and heterogeneous (nanostructured) thin dielectric layers. The experimental and computing results reveal that the radial component of the electric field conveys the charge lateral spreading whereas the axial component of the electric field governs the amount of injected charges. The electric field distribution is slightly influenced by the heterogeneity of the material. Moreover, the interpretation of the current measurements requires consideration of the entire electric field distribution and not only the computed field at the contact point.
Keywords : thin layer dielectric KPFM C-AFM electric field
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C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre. Handling Geometric Features in Nanoscale Characterization of Charge Injection and Transport in thin Dielectric Films. 2018 IEEE 2nd International Conference on Dielectrics (ICD), Jul 2018, Budapest, Hungary. pp.1-4, ⟨10.1109/ICD.2018.8468409⟩. ⟨hal-02324374⟩

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