Parametric study of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane

Vincent Garofano , Luc Stafford (1) , Bernard Despax (2) , Richard Clergeraux , Kremena Makasheva (3)

1 Groupe de Physique des Plasmas
2 LAPLACE - LAboratoire PLasma et Conversion d'Energie
3 LAPLACE-MPP - Matériaux et Procédés Plasmas

Domaines: Sciences de l'ingénieur [physics]

Vincent Garofano, Luc Stafford, Bernard Despax, Richard Clergeraux, Kremena Makasheva. Parametric study of the electron temperature and density in dusty low-pressure RF plasmas with pulsed injection of hexamethyldisiloxane. 2016 IEEE International Conference on Plasma Science (ICOPS), Jun 2016, Banff, Canada. pp.1-1, ⟨10.1109/PLASMA.2016.7534044⟩. ⟨hal-02324481⟩