130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Lucien Schwab (1) , Pierre-Etienne Allain (2) , Louise Banniard (3) , Nicolas Mauran (4) , Denis Lagrange (4) , Alexandre Fafin (3) , Marc Gély (3) , Maxime Hermouet (3) , Guillaume Jourdan (3) , Sebastien Hentz (3) , Ivan Favero (2) , Bernard Legrand (1)

1 LAAS-MEMS - Équipe Microsystèmes électromécaniques
2 MPQ (UMR_7162) - Laboratoire Matériaux et Phénomènes Quantiques
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
4 LAAS-I2C - Service Instrumentation Conception Caractérisation

We show all-optical operation of a VLSI optomechanical micro-resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q-factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10 -16 m.Hz -0.5 . This performance, enabled by optomechanical transduction, paves the way for very high-speed and ultra-sensitive sensing applications.

Mots clés: Optical sensors; Optical device fabrication; Optical resonators; Optical surface waves; Resonant frequency; Mechanical sensors

Domaines: Micro et nanotechnologies/Microélectronique

Lucien Schwab, Pierre-Etienne Allain, Louise Banniard, Nicolas Mauran, Denis Lagrange, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩