Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry

Bernard Despax (1) , F. Gaboriau (2) , Hubert Caquineau (3) , Kremena Makasheva (3)

1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
2 LAPLACE-GREPHE - Groupe de Recherche Energétique, Plasmas et Hors Equilibre
3 LAPLACE-MPP - Matériaux et Procédés Plasmas

Domaines: Sciences de l'ingénieur [physics]

Bernard Despax, F. Gaboriau, Hubert Caquineau, Kremena Makasheva. Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry. AIP Advances, 2016, 6 (10), pp.105111. ⟨10.1063/1.4966254⟩. ⟨hal-02448285⟩