Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane

Vincent Garofano (1) , Luc Stafford (1) , Bernard Despax (2) , Richard Clergereaux (3) , Kremena Makasheva (3)

1 UdeM - Université de Montréal
2 LAPLACE - LAboratoire PLasma et Conversion d'Energie
3 LAPLACE-MPP - Matériaux et Procédés Plasmas

Domaines: Sciences de l'ingénieur [physics]; Plasmas

Vincent Garofano, Luc Stafford, Bernard Despax, Richard Clergereaux, Kremena Makasheva. Cyclic evolution of the electron temperature and density in dusty low-pressure radio frequency plasmas with pulsed injection of hexamethyldisiloxane. Applied Physics Letters, 2015, 107 (18), pp.183104. ⟨10.1063/1.4935030⟩. ⟨hal-02448502⟩