Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

Isabelle Dufour (1) , Luis Iglesias Hernandez (1) , Priyadarshini Shanmugam (2) , Jean-François Michaud (2) , Daniel Alquier (2) , Dominique Certon (2) , Maria Dolores Manrique-Juarez (3) , Thierry Leichle (4, 3) , Fabrice Mathieu (5) , Laurent Mazenq (6) , Liviu Nicu (3)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
3 LAAS-MEMS - Équipe Microsystèmes électromécaniques
4 Georgia Tech Lorraine [Metz]
5 LAAS-I2C - Service Instrumentation Conception Caractérisation
6 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

Principles of gas detection using either resonant microcantilevers or CMUTs without sensitive coating are presented. The different principles which have been tested for hydrogen detection are based on the use of electrical measurements to estimate physical gas properties (mass density, viscosity, sound velocity).

Mots clés: resonant MEMS; CMUT; microcantilever; gas detection; resonant frequency; quality factor; time of flight; viscosity; mass density; sound velocity I

Domaines: Micro et nanotechnologies/Microélectronique

Isabelle Dufour, Luis Iglesias Hernandez, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, et al.. Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures. 2020 Joint Conference of the IEEE International Frequency Control Symposium and the IEEE International Symposium on Applications of Ferroelectrics, Jul 2020, Keystone (virtual conference), United States. pp.1-3, ⟨10.1109/IFCS-ISAF41089.2020.9234908⟩. ⟨hal-02481928⟩