Millimeter-wave three-state tunable stopband resonator based on integrated MEMS

Pedro Rynkiewicz (1) , Anne-Laure Franc (2) , Fabio Coccetti (3, 4) , Selin Tolunay Wipf , Matthias Wietstruck (5) , Mehmet Kaynak (5) , Gaëtan Prigent (1)

1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
2 LAPLACE-GRE - Groupe de Recherche en Electromagnétisme
3 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
4 RF Microtech France
5 IHP - Leibniz-Institut für innovative Mikroelektronik

This paper presents a fully integrated MEMS-based tunable stopband resonator. Two MEMS available in a SiGe BiCMOS technology are implemented to modify the electrical length of a microstrip stub that targets three center frequencies which are 60 GHz, 77 GHz, and 94 GHz. The agreement between the electromagnetic simulations and the measurement results is very good, proving the high reliability of the technology.

Domaines: Electromagnétisme; Micro et nanotechnologies/Microélectronique

Pedro Rynkiewicz, Anne-Laure Franc, Fabio Coccetti, Selin Tolunay Wipf, Matthias Wietstruck, et al.. Millimeter-wave three-state tunable stopband resonator based on integrated MEMS. 2017 IEEE Asia Pacific Microwave Conference (APMC), Nov 2017, Kuala Lumpar, Malaysia. pp.128-131, ⟨10.1109/APMC.2017.8251394⟩. ⟨hal-02501265⟩