Tunable dual-mode ring filter based on BiCMOS embedded MEMS in V-band

Pedro Rynkiewicz (1) , Anne-Laure Franc (2) , Fabio Coccetti (3) , Selin Tolunay Wipf , Matthias Wietstruck (4) , Mehmet Kaynak (4) , Gaëtan Prigent (1)

1 LAPLACE - LAboratoire PLasma et Conversion d'Energie
2 LAPLACE-GRE - Groupe de Recherche en Electromagnétisme
3 RF Microtech France
4 IHP - Leibniz-Institut für innovative Mikroelektronik

This paper presents the design of a fully integrated tunable filter implemented in SiGe-BiCMOS technology. The narrow bandpass filter (12%) is aimed at addressing two operating frequencies at 56 GHz and 74 GHz. A synthesis is proposed to control the nominal filter as well as tunability which is obtained by the use of embedded MEMs. A good agreement between electromagnetic simulation and measurement is obtained which proves the quality of both the proposed concept and the technological process.

Mots clés: Tunable filter ; MEMS ; Integrated filter ; BiCMOS ; Millimeter wave ; V-band

Domaines: Electromagnétisme; Micro et nanotechnologies/Microélectronique

Pedro Rynkiewicz, Anne-Laure Franc, Fabio Coccetti, Selin Tolunay Wipf, Matthias Wietstruck, et al.. Tunable dual-mode ring filter based on BiCMOS embedded MEMS in V-band. 2017 IEEE Asia Pacific Microwave Conference (APMC), Nov 2017, Kuala Lumpar, Malaysia. pp.124-127, ⟨10.1109/APMC.2017.8251393⟩. ⟨hal-02501269⟩