Analysis of thin and thick Films

Philippe Le Coustumer (1) , Patrick Chapon (2) , Agnès Tempez (2) , Yuriy Popov (2) , George Thompson (3) , Igor Molchan (3) , Nicolas Trigoulet (3) , Peter Skeldon (3) , Antonino Licciardello (4) , Nunzio Tuccitto (4) , Ivan Delfanti (4) , Katrin Fuhrer (5) , Marc Gonin (5) , James Whitby (5, 6) , Markus Hohl (5) , Christian Tanner (5) , Nerea Bordel Garcia (7) , Lara Lobo Revilla , Jorge Pisonero (7) , Rosario Pereiro (7) , Cristina Gonzalez Gago (7) , Alfredo Sanz Medel (7) , Mihai Ganciu Petcu (8) , Ani Surmeian (8) , Constantin Diplasu (8) , Andreea Groza (8) , Norbert Jakubowski (9) , Roland Dorka (9) , Stela Canulescu (10) , Johann Michler (11) , Philippe Belenguer (12) , Thomas Nelis (13) , Abdellatif Zahri (13) , Philippe Guillot (14) , Laurent Thérèse (14) , Arnaud Littner , Richard Vaux , Julien Malherbe , Frédéric Huneau (1) , Fred Stevie (15) , Hugues Francois-Saint-Cyr (16)

1 UB - Université de Bordeaux
2 HORIBA France SAS [Longjumeau]
3 University of Manchester [Manchester]
4 Unict - Università degli studi di Catania = University of Catania
5 Tofwerk AG
6 EMPA - Swiss Federal Laboratories for Materials Science and Technology [Dübendorf]
7 University of Oviedo
8 National Institute for Lasers, Plasma, and Radiation Physics - INFLPR (ROMANIA)
9 ISAS - Leibniz Institute for Analytical Sciences
10 UT - Université de Toulouse
11 EMPA Mechanics of Materials and Nanostructures
12 LAPLACE-GREPHE - Groupe de Recherche Energétique, Plasmas et Hors Equilibre
13 LAPLACE - LAboratoire PLasma et Conversion d'Energie
14 DPHE - Diagnostic des Plasmas Hors Equilibres
15 NC State - North Carolina State University [Raleigh]
16 Cameca

Due to its enormous sensitivity and ease of use, mass spectrometry has grown into the analytical tool of choice in most industries and areas of research. This unique reference provides an extensive library of methods used in mass spectrometry, covering applications of mass spectrometry in fields as diverse as drug discovery, environmental science, forensic science, clinical analysis, polymers, oil composition, doping, cellular research, semiconductor, ceramics, metals and alloys, and homeland security. The book provides the reader with a protocol for the technique described (including sampling methods) and explains why to use a particular method and not others. Essential for MS specialists working in industrial, environmental, and clinical fields.

This chapter contains sections titled:
Introduction
Thin and Thick Layers: A Tentative Definition
What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques?
Main MS Techniques Applied to Thin/Thick Films
Time of Sputtering/Speed of Acquisition Trade‐Off
Differences in Sputtering/Ionization Mechanisms between SIMS and GD‐MS
Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry
Measurement and Data Interpretation in GD‐TOFMS
Practical Examples
Conclusions
List of Abbreviations
References

Domaines: Instrumentations et Détecteurs [physics.ins-det]; Science des matériaux [cond-mat.mtrl-sci]

Philippe Le Coustumer, Patrick Chapon, Agnès Tempez, Yuriy Popov, George Thompson, et al.. Analysis of thin and thick Films. Mike S. Lee. Mass Spectrometry Handbook, John Wiley & Sons, Inc., pp.943-959, 2012, 9780470536735. ⟨10.1002/9781118180730.ch41⟩. ⟨hal-02540044⟩