Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

David Barat (1) , Véronique Bardinal (2) , I. Dika (3) , O. Soppera (3) , Anna Rumyantseva (4) , Benjamin Reig (5) , Mickaël Renault (4) , Aurélien Bruyant (4) , Jean-Baptiste Doucet (6) , Thierry Camps (5) , Jean-Pierre Malval (3) , Emmanuelle Daran (6)

1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
2 LAAS-PHOTO - Équipe Photonique
3 IS2M - Institut de Science des Matériaux de Mulhouse
4 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
5 LAAS - Laboratoire d'analyse et d'architecture des systèmes
6 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photopolymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.

Mots clés: photo-polymerization; laser writing; micro-optics; maskless fabrication; optical probing

Domaines: Optique / photonique; Micro et nanotechnologies/Microélectronique; Matériaux; Electronique

David Barat, Véronique Bardinal, I. Dika, O. Soppera, Anna Rumyantseva, et al.. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization. Microelectronic Engineering, 2013, 111, pp.204-209. ⟨10.1016/j.mee.2013.03.155⟩. ⟨hal-02569641⟩