Substrate Integrated Waveguide Bandpass Filters implemented on Silicon Interposer for Terahertz Applications

Gaëtan Prigent (1) , Anne-Laure Franc (2) , Matthias Wietstruck (3) , Mehmet Kaynak (3)

1 LAAS-MOST - Équipe Microondes et Opto-microondes pour Systèmes de Télécommunications
2 LAPLACE-GRE - Groupe de Recherche en Electromagnétisme
3 IHP - Innovations for High Performance Microelectronics

This paper deals with the design of Substrate Integrated Waveguide (SIW) bandpass filter for D-band (140 GHz) and terahertz (280 GHz and 420 GHz) applications. The filters are implemented in High Resistivity (HR) Silicon interposer technology provided by IHP foundry using Through Silicon Vias (TSV). Filters with 3 dB relative bandwidth of 5% and 10% are designed. A comparison of the filters performance is made for the different frequency range. It evidences the interest of SIW technology in sub-millimeter wave domain towards the resonator quality factor increase and, therefore, insertion loss reduction for filters.

Mots clés: SIW; Filters; Si-based Integrated Passive Devices

Domaines: Electromagnétisme; Micro et nanotechnologies/Microélectronique

Gaëtan Prigent, Anne-Laure Franc, Matthias Wietstruck, Mehmet Kaynak. Substrate Integrated Waveguide Bandpass Filters implemented on Silicon Interposer for Terahertz Applications. IEEE Internationnal Microwave Symposium, Jun 2020, Los Angeles, United States. ⟨10.1109/IMS30576.2020.9223781⟩. ⟨hal-02948150⟩