Step-up voltage converter for mems actuators by piezoelectric transformers

François Pigache (1) , Pokorny Marek (2) , Marc Cousineau (3) , Bertrand Nogarède (1)

1 LAPLACE-GREM3 - Groupe de Recherches en Electrodynamique
2 LAPLACE - LAboratoire PLasma et Conversion d'Energie
3 LAPLACE-CS - Convertisseurs Statiques

This paper is about the validation of minimal electronic structure developed around piezoelectric transformer for high voltage mems supply. High voltage and compactness are main requirements leading to the development of electronic circuit. The selected solution is discussed and experimentally validated by a first prototype. I.

Mots clés: piezoelectric transformers; mems; Dickson charge pump; piezoelectric transformers

Domaines: Sciences de l'ingénieur [physics]; Energie électrique; Electromagnétisme

François Pigache, Pokorny Marek, Marc Cousineau, Bertrand Nogarède. Step-up voltage converter for mems actuators by piezoelectric transformers. IECON 2009 - 35th Annual Conference of IEEE Industrial Electronics (IECON), Nov 2009, Porto, Portugal. pp.889-894, ⟨10.1109/IECON.2009.5415036⟩. ⟨hal-03284756⟩