Design and fabrication of a compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source

Qingyue Li , Vincent Raimbault (1) , Philippe Menini (1) , Thierry Camps (1) , Véronique Bardinal (1)

1 LAAS-MICA - Équipe MICrosystèmes d'Analyse

A compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source is designed for health and environmental applications. The overall system is optimized using simulation tools by considering cleanroom fabrication tolerances. First fabrication results on 3D printed lens for VCSEL collimation and 800nm period aluminum grating couplers are highlighted.

Mots clés: microring resonator; grating coupler; optical gas sensor; polymer; VCSEL; 2-photon lithography

Domaines: Micro et nanotechnologies/Microélectronique

Qingyue Li, Vincent Raimbault, Philippe Menini, Thierry Camps, Véronique Bardinal. Design and fabrication of a compact gas sensor integrating a polymer microresonator and a 850nm VCSEL source. 22nd Photonics North Conference, May 2020, Vancouver, Canada. ⟨hal-02988370⟩