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hal-01687810v1  Journal articles
Adhitya BhaswaraHohyun KeumS RheeBernard LegrandFabrice Mathieu et al.  Fabrication of nanoplate resonating structures via micro-masonry
Journal of Micromechanics and Microengineering, IOP Publishing, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩
hal-01203144v1  Conference papers
Olivier ThomasBernard LegrandCécile Fuinel. Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications
ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩
hal-01962209v1  Conference papers
Fei WangDamien DucatteauDavid TroadecHassan TanbakuchiBernard Legrand et al.  Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry
European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom
hal-01961045v1  Journal articles
Zhuang XiongBernard Legrand. Design and measurement of AFM probe based on MEMS resonator
High Power Laser and Particle Beams, China Academy of Engineering Physics and Nuclear Society, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩
cea-01844451v1  Conference papers
A. GriraC. Rotinat-LibersaBernard LegrandL. Buchaillot. A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
hal-01279717v1  Conference papers
Cécile FuinelKhadim DafféAdrian LabordeOlivier ThomasLaurent Mazenq et al.  HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
hal-02407634v1  Conference papers
Lucien SchwabPierre AllainDidier TheronMarc FaucherBenjamin Walter et al.  Optomechanics: a key towards next-generation experiments in atomic force microscopy?
International Conference on Quantum Metrology and Sensing, Dec 2019, Paris, France
hal-01908666v1  Conference papers
Bernard LegrandLucien SchwabPierre AllainIvan FaveroMarc Faucher et al.  MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors
AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States
hal-01962187v1  Conference papers
Didier TheronFei WangThomas DargentDamien DucatteauC. Brillard et al.  SMM characterization of Au nanodots and FcC11SH molecules
XX Annual Linz Winter Workshop, Advances in Single-Molecule Research for Biology & Nanoscience, Feb 2018, Linz, Austria
hal-01960910v1  Journal articles
Zhuang XiongEstelle MairiauxBenjamin WalterMarc FaucherLionel Buchaillot et al.  Two types of MEMS-based oscillating AFM probes
Journal of Chinese Electron Microscopy Society , Chinese Physical Society 2014, 2, pp.137-141
hal-01687809v1  Conference papers
Adhitya BhaswaraDenis DezestLiviu NicuThierry LeichleBernard Legrand. Determination of the effective mass and stiffness of a micro resonator from a single optical characterization
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
hal-01962410v1  Conference papers
Adhitya BhaswaraHohyun KeumFabrice MathieuBernard LegrandSeok Kim et al.  Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
hal-01962981v1  Conference papers
Cécile FuinelFabrice MathieuBernard Legrand. Driving and sensing M/NEMS flexural vibration using dielectric transduction
31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
hal-01962997v1  Conference papers
Régis HamelinGéraldine AndrieuxIsabelle ChartierBahaa El RoustomT. Healy et al.  The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory
International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany
hal-01962426v1  Conference papers
Cécile FuinelFabrice MathieuAdrian LabordeLaurent MazenqChristian Bergaud et al.  High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration
19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
hal-01529673v1  Poster communications
Nicolas MauranDenis LagrangeXavier DollatLaurent MazenqLucien Schwab et al.  High Speed Atomic Force Microscope
NI-Week 2017, May 2017, Austin, TX, United States. 2017
hal-02371188v1  Conference papers
Lucien SchwabSebastien HentzIvan FaveroBernard LegrandPierre-Etienne Allain et al.  130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements
IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
hal-02974151v1  Journal articles
Denis LagrangeNicolas MauranLucien SchwabBernard Legrand. Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes
IEEE Transactions on Control Systems Technology, Institute of Electrical and Electronics Engineers, In press, ⟨10.1109/TCST.2020.3028737⟩
hal-01963015v1  Conference papers
Lucien SchwabPierre Etienne AllainL BanniardA FafinMarc Gely et al.  Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors
64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States