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hal-01857635
v1
Conference papers
Ludovic Marigo-Lombart
,
Jean-Baptiste Doucet
,
Aurélie Lecestre
,
Benjamin Reig
,
Bernard Rousset
et al.
Self-aligned BCB planarization method for high-frequency signal injection in a VCSEL with an integrated modulator
SPIE Photonics Europe
, Apr 2016, Bruxelles, Belgium. 2p
hal-01857636
v1
Conference papers
Ludovic Marigo-Lombart
,
Laurent Mazenq
,
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,
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,
Bernard Rousset
et al.
VCSELs fabricated using self-aligned processing
42nd Micro and Nano Engineering (MNE)
, Sep 2016, Vienna, Austria
hal-01867591
v1
Conference papers
Éric Imbernon
,
Jean Louis Sanchez
,
Patrick Austin
,
Marie Breil
,
O Causse
et al.
FLEXIBLE TECHNOLOGICAL PROCESS FOR FUNCTIONAL INTEGRATION
International Semiconductor Conference (CAS'2001)
, Oct 2001, Sinaia, Romania. pp.465-468
hal-01867595
v1
Conference papers
Éric Imbernon
,
Emmanuel Scheid
,
Françoise Rossel
,
Marie Breil
,
H Carrière
et al.
RÉALISATION DE MURS P + TRAVERSANTS POUR DES FONCTIONS DE PUISSANCE INTÉGRÉES
Seminario Annual de Automatica, Electronica Industrial e Instrumentacion. Electronique de Puissance du Futur (SAAEI-EPF'04)
, Sep 2004, Toulouse, France. 4p
hal-01485548
v1
Other reports
Hugues Granier
,
Véronique Conédéra
,
Monique Dilhan
,
Franck Carcenac
,
Pierre-François Calmon
et al.
Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 17056. 2017
hal-01767583
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 18107. 2018
hal-01867464
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Bilan 2014 des zones de la plateforme de micro et nanotechnologies
Rapport LAAS n°15168. 2015, 105p
hal-01629118
v1
Journal articles
Petru Notingher
,
Ludovic Boyer
,
Olivier Fruchier
,
Serge Agnel
,
Alain Toureille
et al.
Analysis of Data Obtained Using the Thermal-Step Method on a MOS Structure—An Electrostatic Approach
IEEE Transactions on Industry Applications
, Institute of Electrical and Electronics Engineers, 2010, 46 (3), pp.1144 - 1150.
⟨10.1109/TIA.2010.2045211⟩
hal-01867458
v1
Other reports
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
et al.
Protocole d'arrêt général de la plateforme de micro et nanotechnologies du LAAS-CNRS
Rapport LAAS n° 14267. 2014
hal-00385958
v1
Conference papers
Isabelle Bertrand
,
Vasanta Pathirana
,
Éric Imbernon
,
Florin Udrea
,
Marise Bafleur
et al.
New lateral DMOS and IGBT structures realized on a partial SOI substrate based on LEGO process
Bipolar/BiCMOS Circuits and Technology Meeting (BCTM2005)
, Oct 2005, Santa Barbara, United States. pp.74-77
hal-01857638
v1
Poster communications
Ludovic Marigo-Lombart
,
Alexandre Arnoult
,
Laurent Mazenq
,
Pascal Dubreuil
,
Jean-Baptiste Doucet
et al.
Développement de briques technologiques pour la fabrication d’un VCSEL avec un modulateur intégré verticalement
15eme Journees Nano, Micro et Optoelectronique (JNMO)
, May 2016, Les Issambres, France. 2016
hal-01511365
v2
Journal articles
Pierre Temple-Boyer
,
Bernard Rousset
,
Emmanuel Scheid
.
Influences of deposition and crystallization kinetics on the properties of silicon films deposited by low-pressure chemical vapour deposition from silane and disilane
Thin Solid Films
, Elsevier, 2010, 518 (23), pp.6897-6903.
⟨10.1016/j.tsf.2010.07.037⟩
hal-01867462
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
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Aurélie Lecestre
et al.
Bilan 2015 des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Rapport LAAS n° 16053. 2016
hal-01867468
v1
Other reports
Hugues Granier
,
Adrian Laborde
,
Alexandre Arnoult
,
Antoine Maiorano
,
Aurélie Lecestre
et al.
Plate forme de micro et nanotechnologies Bilan 2013 des zones
Rapport LAAS n° 14772. 2014, 108p
hal-01504952
v1
Journal articles
Bessem Kaghouche
,
Farida Mansour
,
Christine Molliet
,
Bernard Rousset
,
Pierre Temple-Boyer
.
Investigation on optical and physico-chemical properties of LPCVD SiOxNy thin films
European Physical Journal: Applied Physics
, EDP Sciences, 2014, 66 (2), pp.20301.
⟨10.1051/epjap.2014130550⟩
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