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hal-01623154v1
Journal articles
Role of Trimethylaluminum in Low Temperature Atomic Layer Deposition of Silicon Nitride Chemistry of Materials, American Chemical Society, 2017, 29 (14), pp.6022-6029. ⟨10.1021/acs.chemmater.7b01816⟩ |
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hal-01452182v1
Journal articles
Enhancing the Reactivity of Al/CuO Nanolaminates by Cu Incorporation at the Interfaces ACS Applied Materials & Interfaces, Washington, D.C. : American Chemical Society, 2015, vol. 7 (n° 22), pp. 11713-11718. ⟨10.1021/acsami.5b02653⟩ |
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