Skip to Main content Skip to Navigation
Help


hal-01816366v1  Conference papers
Maria Manrique-JuarezSylvain RatLaurent MazenqFabrice MathieuIsabelle Séguy et al.  Spin crossover materials for MEMS actuation: Film integration and characterization
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩
...
hal-01144194v1  Conference papers
Denis DezestFabrice MathieuLaurent MazenqLiviu NicuCaroline Soyer et al.  PZT Nanofilm-Based Wafer Scale Nanoresonators
IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
...
hal-01816372v1  Conference papers
Daisuke SayaDenis DezestThierry LeichleFabrice MathieuLiviu Nicu et al.  Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films
2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), May 2017, Atlanta, United States. ⟨10.1109/ISAF.2017.8000219⟩
...
hal-01203229v1  Conference papers
Olivier ThomasFabrice MathieuW. MansfieldC. HuangS. Trolier-Mckinstry et al.  Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities
26th IEEE international conference on micro electro mechanical systems (MEMS 2013), Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474310⟩
...
hal-01279717v1  Conference papers
Cécile FuinelKhadim DafféAdrian LabordeOlivier ThomasLaurent Mazenq et al.  HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩